Semi-industrial line for small series production
The pre-industrial Roll-to-Roll platform is capable of producing a broad range of coatings on flexible substrates with a combination of rotatable and/or planar magnetrons and PECVD sources. The machine can be used as a pilot coater or a small-scale manufacturing tool to produce Low-E and solar control coatings for window films, conductive ITO films, thin-film solid state battery materials, and even flexible printed circuits.
Features
- Coating speed between 0.1 and 25 m/min
- Plasma pre-treatment and IR-heating for accelerated de-gassing
- Temperature-controlled coating drum (-15 to +80°C)
- Turbomolecular pumps and cold traps for high-vacuum processes
- In-situ layer measurement systems
- Compact footprint for minimal floorspace requirement
- Low particle generation and superior thickness uniformity
